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Conference

Process modelling for reactive magnetron sputtering

Subjects: reactive sputtering; magnetron sputtering; thin films

  • Source: VWIII Potential and Applications of Thin Ceramic and Metal Coatings nd PATCMC, 6th - 8th June, 2011 Plzeň, Czech Republic. :25-28

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  • 1-10 ل  224 نتائج ل ""Engineering Physics""