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Publisher : national academies press

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Database Needs for Modeling and Simulation of Plasma Processing

Authors : National Research Council; Division on Engineering and Physical Sciences; Commission on Physical Sciences, Mathematics, and Applications

Subjects: Semiconductors--Design and construction--Congresses; Plasma engineering--Databases--Congresses; Plasma engineering--Computer simulation--CongressesSCIENCE / General; SCIENCE / Space Science / Astronomy

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