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Academic Journal

Local and quantitative measurement of mechanical properties by electrical-nanoindentation in situ SEM: Application to a multi-phase AgCuPd alloy

Authors : Boujrouf, Chaymaa; Rusinowicz, Morgan; Iruela, Solène ...

Subjects: nanoindentation; mechanical properties of multiphase alloys; ECR

Source: ISSN: 1044-5803 ; Materials Characterization ; https://hal.science/hal-04639148 ; Materials Characterization, 2024, 214, pp.114117. ⟨10.1016/j.matchar.2024.114117⟩.

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Conference

Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions

Authors : Abaidi, Mohamed; Belissard, Jordan; Schuch, Nivea ...

Subjects: Roughness; contour metrology; PSD validity domainOnline Only; France

Source: Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV ; SPIE Advanced Lithography ; https://hal.science/hal-03156540 ; SPIE Advanced Lithography, Feb 2021, Online Only,

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Enriching nanoindentation with in-situ electrical measurements and SEM observations

Authors : Volpi, Fabien; Rusinowicz, Morgan; Boujrouf, Chaymaa ...

Subjects: [SPI.MAT]Engineering Sciences [physics]/Materials; [CHIM.MATE]Chemical Sciences/Material chemistry; [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsLyon; France

Source: Nanobrücken 2024 ; https://hal.science/hal-04888596 ; Nanobrücken 2024, Mar 2024, Lyon, France ; https://www.bruker.com/en/news-and-events/events/nanobruecken.html

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SEM pour l'estimation des coûts de fabrication : une étude de cas sur les moules à injection

Authors : Doan, Minh-Phuoc; Joly, Iragaël;

Subjects: Modèles à équations structurelles; Devis de produit; Estimation des coûtsLa Rochelle; France

Source: Actes de la 10ème Conférence Nationale sur les Applications Pratiques de l’Intelligence Artificielle (APIA) ; 10.Conférence Nationale sur les Applications Pratiques de l’Intelligence

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Academic Journal

Operando focused ion beam–scanning electron microscope (FIB-SEM) revealing microstructural and morphological evolution in a solid-state battery

Authors : Perrenot, Patrice; Bayle-Guillemaud, Pascale; Jouneau, Pierre-Henri ...

Subjects: [CHIM]Chemical Sciences

Source: ISSN: 2380-8195.

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Conference

Correlative analysis of beam and air-sensitive materials using TOF-SIMS, SEM and XPS

Authors : Barnes, Jean-Paul; Guyot, Claire; Hirchenhahn, Pierre ...

Subjects: [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]Houston; United StatesHouston, United States

Source: Rice SIMS Workshop 2023 ; https://cea.hal.science/cea-04349706 ; Rice SIMS Workshop 2023, Sep 2023, Houston, United States

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Local probing of multiphased metallic alloys by in situ SEM electricalnanoindentation

Authors : Volpi, F; Boujrouf, C; Rusinowicz, M ...

Source: La metallurgie, quel avenir ! ; https://hal.science/hal-04888530 ; La metallurgie, quel avenir !, SF2M, Jun 2023, Grenoble, France

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Conference

Enriching nanoindentation with real-time electrical measurements and in-situ SEM monitoring

Authors : Volpi, F; Rusinowicz, M; Boujrouf, C ...

Source: Indentation - GIME ; https://hal.science/hal-04888545 ; Indentation - GIME, SF2M, Jul 2023, Tours, France

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Conference

Mechanical and electrical properties of copper oxide layers measured by in situ SEM resistive nanoindentation

Authors : Rusinowicz, Morgan; Volpi, Fabien; Boujrouf, Chaymaa ...

Subjects: resistive-nanoindentation copper oxide finite element modeling; resistive-nanoindentation; copper oxideGalway; Ireland

Source: ESMC ; https://hal.science/hal-04888226 ; ESMC, Jul 2022, Galway, Ireland

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OPC model error study through mask and SEM measurement error

Authors : Top, Mame Kouna; Fuard, David; Farys, Vincent ...

Subjects: Lithography; Modeling; OPCSan Jose (CA); United States

Source: Proceedings of SPIE ; Metrology, Inspection, and Process Control for Microlithography XXIV ; https://hal.science/hal-00462229 ; Metrology, Inspection, and Process Control for Microlithography XXIV,

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فلترة النتائج

Local and quantitative measurement of mechanical properties by electrical-nanoindentation in situ SEM: Application to a multi-phase AgCuPd alloy

Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions

Enriching nanoindentation with in-situ electrical measurements and SEM observations

SEM pour l'estimation des coûts de fabrication : une étude de cas sur les moules à injection

Operando focused ion beam–scanning electron microscope (FIB-SEM) revealing microstructural and morphological evolution in a solid-state battery

Correlative analysis of beam and air-sensitive materials using TOF-SIMS, SEM and XPS

Local probing of multiphased metallic alloys by in situ SEM electricalnanoindentation

Enriching nanoindentation with real-time electrical measurements and in-situ SEM monitoring

Mechanical and electrical properties of copper oxide layers measured by in situ SEM resistive nanoindentation

OPC model error study through mask and SEM measurement error

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