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Tilt angle measurement with a Gaussian-shaped laser beam tracking

• Authors : Šarbort, Martin; Řeřucha, Šimon; Jedlička, Petr

Subjects: Physics - Instrumentation and Detectors; Physics - Applied Physics; Physics - Optics

• Source: Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321E (1 May 2014)

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