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Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

Subjects: Materials science; Silicon; Scanning electron microscope

  • Source: Beilstein Journal of NanotechnologyBeilstein Journal of Nanotechnology, Karlsruhe Institute of Technology., 2019, 10, pp.1523-1536. ⟨10.3762/bjnano.10.150⟩Beilstein Journal of

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