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Dissertation/ Thesis

Quantifying local variabilities from CD-SEM images for the reliability of 28 FD-SOI technologies ; Quantification des variabilités locales à partir d'images CD-SEM pour la fiabilité des technologies 28 FD-SOI

Subjects: Stochastic; Variability; Metrology

  • Source: https://theses.hal.science/tel-04504081 ; Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes [2020-.], 2023. Français. ⟨NNT : 2023GRALT079⟩.

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