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Academic Journal

Correlation of stress in silicon nitride layers with their complete removal by laser ablation

Subjects: ablation; laser; stress

  • Source: Energy Procedia. 2013, 38, pp. 707-712. ISSN 1876-6102. eISSN 1876-6102. Available under: doi:10.1016/j.egypro.2013.07.336

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