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Academic Journal

Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water

Subjects: ALD; TMA; Surface mechanisms

  • Source: ISSN: 0009-2509 ; Chemical Engineering Science ; https://hal.science/hal-02329135 ; Chemical Engineering Science, 2019, 195, pp.399-412. ⟨10.1016/j.ces.2018.09.037⟩.

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Conference

CFD analysis of an ALD reactor: gaseous species distribution and cycle time

Subjects: ALD; CFD simulation; AluminaChatou; FranceChatou, France

  • Source: Workshop du Réseau des Acteurs Français de l' Atomic Layer Deposition (RAFALD) ; https://hal.science/hal-03629731 ; Workshop du Réseau des Acteurs Français de l' Atomic Layer Deposition (RAFALD),

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Academic Journal

Engineered porosity-induced burn rate enhancement in dense Al/CuO nanothermites

Subjects: nanothermites; porous nanolaminate; Al/CuO

  • Source: ISSN: 2574-0962 ; ACS Applied Energy Materials ; https://laas.hal.science/hal-03584996 ; ACS Applied Energy Materials, 2022, ⟨10.1021/acsaem.1c03805⟩.

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  • 1-10 of  23 نتائج ل ""alumina""