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  • 1-4 ل  4 نتائج ل ""SURFACE potential""

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Collection : Universite Toulouse 2 - Jean Jaures
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Conference

Effect of Humidity on Dielectric Charging Process in Electrostatic Capacitive RF MEMS Switches Based on Kelvin Probe Force Microscopy Surface Potential Measurements

Subjects: [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsBoston; United StatesBoston, United States

  • Source: Proceedings of MRS Fall Meeting 2009 ; MRS Fall Meeting 2009 ; https://hal.science/hal-00670181 ; MRS Fall Meeting 2009, Nov 2009, Boston, United States. 6 p

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Academic Journal

Effect of deposition reactive gas ratio, RF power and substrate temperature on the charging/discharging processes in PECVD silicon nitride films based on induced surface potential and adhesive force measurements using atomic force microscopy

Subjects: Adhesive force; dielectric charging; electrostatic microelectromechanical systems (MEMS)

  • Source: ISSN: 1057-7157 ; Journal of Microelectromechanical Systems ; https://hal.science/hal-00670055 ; Journal of Microelectromechanical Systems, 2011, 20 (6), pp.1395-1417.

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Conference

Frequency Dependence of Modulated Surface Photovoltage (SPV) to Characterize Surface Defects

Subjects: Silicon; defects; surface photovoltageLisbonne; Portugal

  • Source: 40th European Photovoltaic Solar Energy Conference (EU PVSEC 2023)https://hal.science/hal-0428640240th European Photovoltaic Solar Energy Conference (EU PVSEC 2023), Sep 2023, Lisbonne,

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New insights into reliability of electrostatic capacitive RF MEMS switches

Subjects: [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

  • Source: ISSN: 1759-0787.

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  • 1-4 ل  4 نتائج ل ""SURFACE potential""