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Conference

Investigating the nucleation of Al2O3 on clean Si in ALD : plasma post and pre-processing

Subjects: ALD - Atomic layer deposition; Al2O3 growth kinetics; Plasma pre-treatmentAutrans; France

  • Source: School of Atomic Layer Deposition ; https://hal.science/hal-03843720 ; School of Atomic Layer Deposition, Oct 2022, Autrans, France. , 2022 ; https://www.azur-colloque.fr/DR11/inscription/info/241

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Conference

Investigating the nucleation of Al2O3 on clean Si in ALD : plasma post and pre-processing

Subjects: Al2O3 growth kinetics; Atomic Layer Deposition; plasma etchingAUTRANS; France

  • Source: School of Atomic Layer Deposition ; https://laas.hal.science/hal-03845065 ; School of Atomic Layer Deposition, Oct 2022, AUTRANS, France. 2022

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Conference

Si_Z O_X N_Y BY INDUCTIVE-COUPLED-PLASMA PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FOR MULTI-LAYER OPTICAL THIN FILMS

Subjects: Chemical vapour deposition CVD; Silicon Dioxide; Silicon nitrideBesançon; France

  • Source: Journées Nationales des Technologies Emergente ; https://laas.hal.science/hal-03948838 ; Journées Nationales des Technologies Emergente, Nov 2022, Besançon, France. 2022

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Academic Journal

Plasma progranulin levels for frontotemporal dementia in clinical practice: a 10-year French experience

Subjects: Frontotemporal dementia; Progranulin (GRN); Plasma progranulin levels

  • Source: ISSN: 0197-4580 ; Neurobiology of Aging ; https://unilim.hal.science/hal-02870179 ; Neurobiology of Aging, 2020, 91, pp.167.e1-167.e9. ⟨10.1016/j.neurobiolaging.2020.02.014⟩.

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