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Academic Journal

Tilt-related alignment issues in miniature micromechanical on-wafer electrical probes composed of multiple flexible microcantilevers

Subjects: [SPI]Engineering Sciences [physics]

  • Source: ISSN: 2631-8695 ; Engineering Research Express ; https://cnrs.hal.science/hal-04485030 ; Engineering Research Express, 2024, 6 (1), ⟨10.1088/2631-8695/ad2ccc⟩.

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