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النتائج لكل صفحة: 10
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Collection : Universite Polytechnique Hauts-De-France فلترة بواسطة : موضوع
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Academic Journal

Gas phase growth of metal-organic frameworks on microcantilevers for highly sensitive detection of volatile organic compounds

Subjects: MEMS-device; Cantilever; sensor

  • Source: ISSN: 2166-532X.

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Report

Rapport d'activité final du Projet 'Unconventional Principles of Thermoelectric Generation' ; Rapport d'activité final du Projet 'Unconventional Principles of Thermoelectric Generation': ERC StG 338179

Subjects: Thermoelectricity; Energy harvesting; Thermoelectric Converters

  • Source: https://hal.science/hal-04540093 ; Institut d'Electonique, Microélectronique et de nanotechnologie - UMR8520. 2024.

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Conference

Flight-Testing of a MEMS Wall Shear Stress Thermal Sensor on a Microlight Aircraft

Subjects: MEMS; thermal sensor; Wall shear stress sensorVienna; Austria

  • Source: 2023 IEEE SENSORShttps://hal.science/hal-043968742023 IEEE SENSORS, Oct 2023, Vienna, Austria. pp.1-4, ⟨10.1109/SENSORS56945.2023.10325107⟩

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Academic Journal

A micro-electro-mechanical accelerometer based on gallium nitride on silicon

Subjects: Acceleration measurement; Proof mass; Heterostructures

  • Source: ISSN: 0003-6951.

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Conference

Single cell classification using statistical learning on mechanical properties measured by mems tweezers

Subjects: Single-cell characterization; supervised learning; MEMS tweezersTokyo; Japan

  • Source: IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022) ; https://inria.hal.science/hal-03528082 ; IEEE 35th International

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Conference

On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching

Subjects: multiphysics simulation; hands-on experiment; MEMS theoryWuhan; China

  • Source: IEEE International Conference on Engineering, Technology & Education (TALE) 2021 ; 2021 IEEE International Conference on Engineering, Technology & Education (TALE) ; https://hal.science/hal-03548801 ;

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Conference

MEMS high temperature gradient sensor for skin-friction measurements in highly turbulent flows ; Capteur thermique MEMS pour la mesure du frottement dans les éouclements fortement turbulents

Subjects: THERMAL SENSOR; MEMS; TURBULENCE MEASUREMENTSMontrealMontreal, Canada

  • Source: 2019 IEEE SENSORShttps://hal.science/hal-029044762019 IEEE SENSORS, Oct 2019, Montreal, Canada. ⟨10.1109/SENSORS43011.2019.8956802⟩

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Conference

Aerodynamic wall pressure measurement using a high temperature gradient Pirani micro-sensor

Subjects: Pirani sensor; Pressure sensor; MEMSRotterdam; Netherlands

  • Source: 2020 IEEE SENSORShttps://hal.science/hal-031870732020 IEEE SENSORS, Oct 2020, Rotterdam, Netherlands. pp.1-3, ⟨10.1109/SENSORS47125.2020.9278842⟩

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Academic Journal

MEMS High Temperature Gradient Sensor for Skin-Friction Measurements in Highly Turbulent Flows

Subjects: MEMS SENSOR; SKIN-FRICTION MEASUREMENT; [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

  • Source: ISSN: 1530-437X ; IEEE Sensors Journal ; https://hal.science/hal-03229029 ; IEEE Sensors Journal, 2021, 21 (8), pp.9749-9755. ⟨10.1109/JSEN.2020.2991785⟩.

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Academic Journal

Optimization of Reactive-Ion Etching (RIE) parameters to maximize the lateral etch rate of silicon using SF6/N2 gas mixture: An alternative to etching Si in MEMS with Au components

Subjects: Isotropic Si RIE; Microstructure; Au Thin films

  • Source: ISSN: 0167-577X ; Materials Letters ; https://hal.science/hal-03330078 ; Materials Letters, 2021, 285, pp.129058. ⟨10.1016/j.matlet.2020.129058⟩.

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