Item request has been placed! ×
Item request cannot be made. ×
loading  Processing Request
Item request has been placed! ×
Item request cannot be made. ×
loading  Processing Request
Conference

Impact of low thermal processes on reliability of HK/MG stacks

Subjects: [SPI.MAT]Engineering Sciences [physics]/Materials; [CHIM.MATE]Chemical Sciences/Material chemistry; [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsCatania; Italy

  • Source: Book of abstracts of WODIM 2016 ; 19th Workshop on Dielectrics in Microelectronics (WoDIM) ; https://hal.science/hal-02051859 ; 19th Workshop on Dielectrics in Microelectronics (WoDIM), Jun 2016,

تفاصيل العنوان

×
  • 1-10 ل  29 نتائج ل ""Lu C.""