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Dissertation/ Thesis

High Frequency MEMS Sensor for Aeroacoustic Measurements ; Microcapteurs de hautes fréquences pour des mesures en aéroacoustique

Subjects: Aero-acoustic; Bulk micro-machining; MEM

  • Source: https://theses.hal.science/tel-00947304 ; Autre. Université de Grenoble, 2013. Français. ⟨NNT : 2013GRENT037⟩.

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  • 1-3 ل  3 نتائج ل ""Polycrystalline silicon""