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Academic Journal

Influence of initial crystalline phase of TiO2 to obtain TiN thin films from sol-gel route by rapid thermal nitridation process

Subjects: Titanium nitride Sol-gel method Rapid thermal nitridation; [SPI]Engineering Sciences [physics]

  • Source: ISSN: 0079-6786 ; Progress in Solid State Chemistry ; https://hal.science/hal-04677912 ; Progress in Solid State Chemistry, 2024, pp.100462. ⟨10.1016/j.progsolidstchem.2024.100462⟩.

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Conference

Use of epitaxial PZT thin films for La2/3Sr1/3MnO3 based MEMs devices on SrTiO3/Si

Subjects: Micromechanical devices; Magnetic films; FabricationONLINE - Lyon; France

  • Source: 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)DTIP’2021 (23rd edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS)

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Conference

Photoacoustic investigation of nanoparticles ultra-thin films

Subjects: photoacoustics; nanoparticles; granular thin filmsLyon; France

  • Source: Forum Acusticum ; https://hal.science/hal-03240232 ; Forum Acusticum, Dec 2020, Lyon, France. pp.2545-2547, ⟨10.48465/fa.2020.0178⟩

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Academic Journal

Impact of la Concentration on Ferroelectricity of La-Doped HfO2Epitaxial Thin Films

Subjects: Epitaxial growth; Ferroelectric films; Hafnium oxides

  • Source: ISSN: 2637-6113 ; ACS Applied Electronic Materials ; https://hal.science/hal-03622064 ; ACS Applied Electronic Materials, 2021, 3 (11), pp.4809-4816. ⟨10.1021/acsaelm.1c00672⟩.

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Academic Journal

Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Subjects: Zirconium nitride; Sol-gel method; Rapid thermal nitridation

  • Source: ISSN: 2590-0498 ; Materials Today Advances ; https://hal.science/hal-04229107 ; Materials Today Advances, 2023, 20, pp.100430. ⟨10.1016/j.mtadv.2023.100430⟩.

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