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Collection : The Chinese University Of Hong Kong

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Academic Journal

A study of ion implantation damage and its effects in silicon.

Authors : Chan, Kwok Wai.; Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.

Subjects: Semiconductor doping; Ion implantation; Silicon crystals

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Academic Journal

Damage enhanced diffusion of impurities in semiconductors.

Authors : Lo, Veng Cheong.; Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.

Subjects: Semiconductors--Defects; Semiconductors--Diffusion

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