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Conference

La0.7Sr0.3MnO3 suspended microbridges for uncooled bolometers made using reactive ion etching of the silicon substrates

Subjects: Epitaxial oxide; Silicon; MicromachiningToulouse; France

  • Source: MNE2012 (38th International Micro & Nano Engineering Conference) ; https://hal.science/hal-00977471 ; MNE2012 (38th International Micro & Nano Engineering Conference), Sep 2012, Toulouse, France.

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