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Subjects: [PHYS]Physics [physics]
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Source:
ISSN: 0734-2101 ; Journal of Vacuum Science & Technology A ; https://hal.univ-grenoble-alpes.fr/hal-03449060 ; Journal of Vacuum Science & Technology A, 2021, 39 (3), pp.032416.
تفاصيل العنوان
Subjects: Etching; Processes; Plasma
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Source:
https://theses.hal.science/tel-02905449 ; Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2017. Français. ⟨NNT : 2017GREAT027⟩.
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تفاصيل العنوان
Subjects: Gallium Nitride; Dry etch; MicroLED
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Source:
https://theses.hal.science/tel-04709947 ; Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes [2020-.], 2024. Français. ⟨NNT : 2024GRALT041⟩.
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تفاصيل العنوان