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Academic Journal

Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy

Subjects: Atomic force microscopy (AFM); DataCube; Doping

  • Source: ISSN: 2190-4286 ; Beilstein Journal of Nanotechnology ; https://hal.science/hal-03053497 ; Beilstein Journal of Nanotechnology, 2020, 11, pp.1764 - 1775. ⟨10.3762/bjnano.11.159⟩.

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