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Conference

Identification-Based Approach for Electrical Coupling Compensation in a MEMS Gyroscope

Subjects: parasitic coupling; mechanical modes; electrical coupling modelNaples; FL; United States

  • Source: Proceedings of the 2019 IEEE International Symposium on Inertial Sensors and Systems ; INERTIAL ; https://hal.science/hal-02174925 ; INERTIAL, Apr 2019, Naples, FL,

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