Item request has been placed! ×
Item request cannot be made. ×
loading  Processing Request
Item request has been placed! ×
Item request cannot be made. ×
loading  Processing Request
Conference

Laser anneal of oxycarbosilane low-k film

Subjects: Chemistry; low-k; laser anneal

  • Source: 2016 IEEE International Interconnect Technology conference / Advanced Metallization conference (IIT/AMC) ; ISSN: 2380-6338 ; ISBN: 9781509003860

تفاصيل العنوان

×
  • 1-7 ل  7 نتائج ل ""infra red""