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Conference

Soft x-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures

Subjects: Physics and Astronomy; EUV reflectometry; STEM-EDX

  • Source: METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII ; ISSN: 0277-786X ; ISSN: 1996-756X ; ISBN: 9781510672161 ; ISBN: 9781510672178

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  • 1-10 ل  78 نتائج ل ""TRANSMISSION electron microscopy""