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Dissertation/ Thesis

High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition

Subjects: info:eu-repo/classification/ddc/500; Solarzelle; MikrokristallDE

  • Source: Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Schriften des Forschungszentrums Jülich / Reihe Energie & Umwelt 183, 126 S : graph. Darst (2013). = Dissertation, Universität

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