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Collection : Dublin City University

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Academic Journal

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Authors : Sharma, Sarveshwar; Sirse, Nishant; Turner, Miles M.

Subjects: Plasmas

Source: Sharma, Sarveshwar orcid:0000-0002-0642-0247 , Sirse, Nishant orcid:0000-0002-7063-4100 and Turner, Miles M. orcid:0000-0001-9713-6198 (2020) High frequency sheath modulation and higher harmonic

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