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Conference

Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment: ER: Equipement reliability and productivity enhancements

Subjects: metrology model; spectroscopic reflectometry; multilayer thickness measurementSaratoga Springs; United StatesSaratoga Springs, United States

  • Source: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)Advanced Semiconductor Manufacturing Conference (ASMC 2017 )https://hal.archives-ouvertes.fr/hal-01622569

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Conference

Si_Z O_X N_Y BY INDUCTIVE-COUPLED-PLASMA PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FOR MULTI-LAYER OPTICAL THIN FILMS

Subjects: Chemical vapour deposition CVD; Silicon Dioxide; Silicon nitrideBesançon; France

  • Source: Journées Nationales des Technologies Emergente ; https://laas.hal.science/hal-03948838 ; Journées Nationales des Technologies Emergente, Nov 2022, Besançon, France. 2022

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Academic Journal

Monte-Carlo simulation and experimental study of the effect of internal charging on the electron emission yield of amorphous SiO$_2$ thin films

Subjects: Secondary electron emission; Monte Carlo simulation; Silicon dioxide

  • Source: ISSN: 0368-2048 ; Journal of Electron Spectroscopy and Related Phenomena ; https://hal.science/hal-04061967 ; Journal of Electron Spectroscopy and Related Phenomena, 2022, 261, pp.147265.

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