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Design and Characterization of Next-Generation Micromirrors Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process

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  • معلومة اضافية
    • Contributors:
      Barron, C [Sandia National Labs., Albuquerque, NM (United States)]
    • File Description:
      Medium: ED; Size: 13 p.