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Design and Characterization of Next-Generation Micromirrors Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process
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- المصدر:Conference: IEEE innovative systems in silicon `97, Austin, TX (United States), 8-10 Oct 1997; Other Information: PBD: 1997
- الدخول الالكتروني :
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