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Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method

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اقرأ أكثر حفظ في قائمتي
  • المؤلفون: Houston, Paul; Sime, Nathan
  • نوع التسجيلة:
    Electronic Resource
  • الدخول الالكتروني :
    http://eprints.nottingham.ac.uk/43461/
    http://iopscience.iop.org/article/10.1088/1361-6463/aa77dc/meta;
    http://eprints.nottingham.ac.uk/43461
    http://iopscience.iop.org/article/10.1088/1361-6463/aa77dc/meta
    doi:10.1088/1361-6463/aa77dc
  • معلومة اضافية
    • Publisher Information:
      IOP Publishing
    • نبذة مختصرة :
      In this article we develop a fully self consistent mathematical model describing the formation of a hydrogen plasma in a microwave power assisted chemical vapour deposition (MPA-CVD) reactor employed for the manufacture of synthetic diamond. The underlying multi-physics model includes constituent equations for the background gas mass average velocity, gas temperature, electromagnetic field energy and plasma density. The proposed mathematical model is numerically approximated based on exploiting the discontinuous Galerkin finite element method. We demonstrate the practical performance of this computational approach on a variety of CVD reactor geometries for a range of operating conditions.
    • الموضوع:
      MPA-CVD modelling; Finite element methods; Discontinuous Galerkin methods; Article; PeerReviewed
    • الرقم المعرف:
      10.1088.1361-6463.aa77dc
    • Availability:
      Open access content. Open access content
    • Note:
      doi:10.1088/1361-6463/aa77dc
    • Other Numbers:
      UVN oai:eprints.nottingham.ac.uk:43461
      Houston, Paul and Sime, Nathan (2017) Numerical modelling of MPA-CVD reactors with the discontinuous Galerkin finite element method. Journal of Physics D: Applied Physics, 50 (29). 295202/1-295202/16. ISSN 1361-6463
      doi:10.1088/1361-6463/aa77dc
      1312907830
    • Contributing Source:
      UNIV OF NOTTINGHAM
      From OAIster®, provided by the OCLC Cooperative.
    • الرقم المعرف:
      edsoai.on1312907830
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