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Focused Ion Beams (FIB) — Novel Methodologies and Recent Applications for Multidisciplinary Sciences

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  • المؤلفون: Sezen, Meltem
  • نوع التسجيلة:
    Electronic Resource
  • الدخول الالكتروني :
    ISBN:978-953-51-2252-4
  • معلومة اضافية
    • Publisher Information:
      IntechOpen 2016-02-18
    • نبذة مختصرة :
      Considered as the newest field of electron microscopy, focused ion beam (FIB) technologies are used in many fields of science for site-specific analysis, imaging, milling, deposition, micromachining, and manipulation. Dual-beam platforms, combining a high-resolution scanning electron microscope (HR-SEM) and an FIB column, additionally equipped with precursor-based gas injection systems (GIS), micromanipulators, and chemical analysis tools (such as energy-dispersive spectra (EDS) or wavelength-dispersive spectra (WDS)), serve as multifunctional tools for direct lithography in terms of nano-machining and nano-prototyping, while advanced specimen preparation for transmission electron microscopy (TEM) can practically be carried out with ultrahigh precision. Especially, when hard materials and material systems with hard substrates are concerned, FIB is the only technique for site-specific micro- and nanostructuring. Moreover, FIB sectioning and sampling techniques are frequently used for revealing the structural and morphological distribution of material systems with three-dimensional (3D) network at micro-/nanoscale.This book chapter includes many examples on conventional and novel processes of FIB technologies, ranging from analysis of semiconductors to electron tomography-based imaging of hard materials such as nanoporous ceramics and composites. In addition, recent studies concerning the active use of dual-beam platforms are mentioned
    • الموضوع:
      Modern Electron Microscopy in Physical and Life Sciences; Chapter, Part Of Book
    • الرقم المعرف:
      10.5772.61634
    • Availability:
      Open access content. Open access content
      https://creativecommons.org/licenses/by/3.0
    • Note:
      English
    • Other Numbers:
      UKITO oai:intechopen.com:49526
      https://mts.intechopen.com/articles/show/title/focused-ion-beams-fib-novel-methodologies-and-recent-applications-for-multidisciplinary-sciences
      doi:10.5772/61634
      1274064686
    • Contributing Source:
      INTECHOPEN
      From OAIster®, provided by the OCLC Cooperative.
    • الرقم المعرف:
      edsoai.on1274064686
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