Characterization of Infrared Metasurface Optics with an Optical Scatterometer

An optical scatterometer is used to characterize the infrared scatter of a dielectric metasurface cylindrical lens and two variants of that design. The design uses dielectric nanopillars to create the parabolic phase delay required for lensing; the variants change the length of the nanopillars from the design length of 4 microns to 0.9 and 5.2 microns. Scatter measurements were made at the design wavelength of 4 microns, and at 3.39 and 5 microns. These measurements showed wide-angle scatter greater than that measured for a conventional refractive optic, and that these metasurfaces perform their optical function best at the design wavelength and nanopillar length, or at the longer nanopillar length.