Friction driven micromotors with both clockwise and counterclockwise rotations

This submission presents friction driven angular micro-motors that demonstrate both clockwise (CW) and counter clockwise (CCW) rotations with a single set of mechanical converters. Fabrication technology is based on surface micromachining of polycrystalline silicon layers in thin films. Rotor diameter is 125μm and converter vibration is obtained by the use of combdrive actuators. Rotation direction depends on the operating conditions (driving amplitude and frequency of the actuator) that lead to either pure friction or to friction and stiction between the converters and the rotor. Potential applications for driving micro-mechansims will benefit from a high available torque at low speeds.