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Impact of CMOS Post Nitridation Annealing on Reliability of 40nm 512kB Embedded Flash Array

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  • معلومة اضافية
    • Contributors:
      Laboratoire de Polytech Nice-Sophia (Polytech'Lab); Université Nice Sophia Antipolis (1965 - 2019) (UNS)-Université Côte d'Azur (UniCA); Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP); Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS); STMicroelectronics Rousset (ST-ROUSSET); STMicroelectronics Crolles (ST-CROLLES)
    • بيانات النشر:
      HAL CCSD
    • الموضوع:
      2017
    • Collection:
      HAL Université Côte d'Azur
    • الموضوع:
    • نبذة مختصرة :
      International audience
    • Relation:
      hal-01900747; https://hal.science/hal-01900747; https://hal.science/hal-01900747/document; https://hal.science/hal-01900747/file/Paper_Thibault_KEMPF_IIRW2017_v4.pdf
    • الدخول الالكتروني :
      https://hal.science/hal-01900747
      https://hal.science/hal-01900747/document
      https://hal.science/hal-01900747/file/Paper_Thibault_KEMPF_IIRW2017_v4.pdf
    • Rights:
      info:eu-repo/semantics/OpenAccess
    • الرقم المعرف:
      edsbas.D20BBC5A