Contributors: The University of Tokyo (UTokyo); Centre de Recherche Paul Pascal (CRPP); Université de Bordeaux (UB)-Institut de Chimie - CNRS Chimie (INC-CNRS)-Centre National de la Recherche Scientifique (CNRS); Gunma University; Cancer Heterogeneity, Plasticity and Resistance to Therapies - UMR 9020 - U 1277 (CANTHER); Institut Pasteur de Lille; Réseau International des Instituts Pasteur (RIIP)-Réseau International des Instituts Pasteur (RIIP)-Institut National de la Santé et de la Recherche Médicale (INSERM)-Université de Lille-Centre Hospitalier Régional Universitaire CHU Lille (CHRU Lille)-Centre National de la Recherche Scientifique (CNRS); Laboratory for Integrated Micro Mechatronics Systems (LIMMS); The University of Tokyo (UTokyo)-Centre National de la Recherche Scientifique (CNRS); Bio-Micro-Electro-Mechanical Systems - IEMN (BIOMEMS - IEMN); Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL); JUNIA (JUNIA); Université catholique de Lille (UCL); This work was supported by the JSPS Core-to-Core Program (grant number: JPJSCCA20190006) (M.K.) and benefited from “Contrat de Plan Etat Région” CPER Cancer 2015-2020 (I.V.S., D.C., D.P., M.C.T.). D.P. acknowledges Métropole Européenne de Lille, Inserm, and CNRS, and M.C.T. acknowledges I-SITE ULNE.
نبذة مختصرة : International audience ; The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.
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