Titano okisdų formavimas vandens garų plazmoje ; Formation of titanium oxides using water vapour plasma

Types of plasma, characteristics and plasma interaction with solids are discussed in the literature review of this paper. Also, the plasma immersion ion implantation are described. Water vapour plasma are briefly discussed. Titanium oxide structure and it‘s usage for catalyst which could split water molecules are reviewed. Magnetron deposition are explained in this paper. The titanium film was oxidized by water vapour plasma on experiment. The oxidation of titanium depends on many processes in plasma (adsorption, trapping, formation of oxygen vacancies and etc.). Appliance of titanium oxide is very large in recent times. Experimental technology are discussed and plasma treated films are analysed. Titanium oxidation was analysed by SEM, XRD, AES, GDOES. Oxidation mechanism was explained in this paper.