نبذة مختصرة : International audience ; The fabrication of optical filters whose reflection/transmission response is spatially-graded has been the object ofnumerous research studies over the past decades given their applications in areas including multi- and hyperspectralimaging, structural colouring and even holographic encryption. In this context, the key enabling feature is the ability totailor the thickness profile of at least one layer of the optical coating multilayer stack. To-date, this 3-dimensionalstructuration has been achieved either at the deposition stage or as an additional post-deposition process step. In theformer case, the technique relies on the shaping of the material deposition flux thanks to the insertion of a (moving)mask inside the evaporation or sputtering machine. As such, the method is usually limited to the implementation ofcentimetre-scale variations. A contrario, to reach sub-millimeter-scale features, the preferred approach is based on postdepositionlayer structuration, which is performed using grayscale lithography in the form of multi-(mask-)level opticallithography, or using e-beam or laser lithography. All these approaches are nevertheless relatively complex since theyinvolve either multiple steps or need a very precise calibration of the exposition curve.In this paper, we report that the evaporation through re-usable shadow masks can be used to create optical filterswhose spatial variations can be controlled with a ~70-μm-resolution. Using metal-mirror Fabry-Pérot interferometerstructures as representative optical filters, we demonstrate the ability to adjust the resonance wavelength, the filterbandwidth and extinction ratio, and the coupling strength and splitting in cascaded resonators.
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