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Characterization of LPCVD polycrystalline silicon trap-rich based substrates for RF applications
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- معلومة اضافية
- Contributors:
UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
- الموضوع:
2021
- Collection:
DIAL@UCL (Université catholique de Louvain)
- Relation:
boreal:269385; http://hdl.handle.net/2078.1/269385
- Rights:
info:eu-repo/semantics/openAccess
- الرقم المعرف:
edsbas.83CD9EF7
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