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Characterization of LPCVD polycrystalline silicon trap-rich based substrates for RF applications

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اقرأ أكثر حفظ في قائمتي
  • معلومة اضافية
    • Contributors:
      UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
    • الموضوع:
      2021
    • Collection:
      DIAL@UCL (Université catholique de Louvain)
    • Relation:
      boreal:269385; http://hdl.handle.net/2078.1/269385
    • Rights:
      info:eu-repo/semantics/openAccess
    • الرقم المعرف:
      edsbas.83CD9EF7