Contributors: University of Chemistry and Technology Prague (UCT Prague); Institute of Physics of the Czech Academy of Sciences (FZU / CAS); Czech Academy of Sciences Prague (CAS); Univerzita Karlova Praha, Česká republika = Charles University Prague, Czech Republic (UK); Institut des Matériaux, de Microélectronique et des Nanosciences de Provence (IM2NP); Aix Marseille Université (AMU)-Université de Toulon (UTLN)-Centre National de la Recherche Scientifique (CNRS); Authors (M.H., J.M.-C., P.F., M.N., J.L., M.V., J.K. and L.P.) acknowledge the support of the Ministry of Education, Youth and Sports of the Czech Republic projects SOLID21 CZ.02.1.01/0.0/0.0/16_019/0000760, No. 8F21008 and 8J22FR023, and project No. JP22420 from the International Visegrad Fund. The authors (M.H., P.F., M.V. and M.N.) also acknowledge the support of the Czech Science Foundation (Project No. 22-14886S). The author (J.M.-C.) acknowledges the support of the Czech Science Foundation (Project No. 21-09685S). Funding from PHC Barrande 2022 (48110YA), Campus France, Ministères de l’Europe et des Affaires étrangères (MEAE) et de l’Enseignement supérieur, de la Recherche et de l’Innovation (MESRI) is acknowledged by authors (L.P., V.G., P.F. and M.H.)
نبذة مختصرة : International audience ; The resolution of a quartz crystal microbalance (QCM) is particularly crucial for gas sensor applications where low concentrations are detected. This resolution can be improved by increasing the effective surface of QCM electrodes and, thereby, enhancing their sensitivity. For this purpose, various researchers have investigated the use of micro-structured materials with promising results. Herein, we propose the use of easy-to-manufacture metal blacks that are highly structured even on a nanoscale level and thus provide more bonding sites for gas analytes. Two different black metals with thicknesses of 280 nm, black aluminum (B-Al) and black gold (B-Au), were deposited onto the sensor surface to improve the sensitivity following the Sauerbrey equation. Both layers present a high surface roughness due to their cauliflower morphology structure. A high response (i.e., resonant frequency shift) of these QCM sensors coated with a black metal layer was obtained. Two gaseous analytes, H2O vapor and EtOH vapor, at different concentrations, are tested, and a distinct improvement of sensitivity is observed for the QCM sensors coated with a black metal layer compared to the blank ones, without strong side effects on resonance frequency stability or mechanical quality factor. An approximately 10 times higher sensitivity to EtOH gas is reported for the QCM coated with a black gold layer compared to the blank QCM sensor.
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