Integration of Si/Si-Ge nanostructures in micro-thermoelectric generators

Silicon and silicon-germanium nanostructures were grown, integrated, optimized and characterized for their application in thermoelectric generation. Specifically two kinds of nanostructures were worked: silicon and silicon-germanium nanowire arrays (Si/Si-Ge NW) and polycrystalline silicon nanotube fabrics (pSi NT). The results are dived in four chapters. Chapters 3, 4 and 5 deal with Si/Si-Ge NWs, while chapter 6 presents the pSi NT fabrics. In Chapter 3 the growth and integration of Si/Si-Ge NWs was studied, in order to optimize their properties for thermoelectric application in micro-thermoelectric generators (µTEG). First, the methods for depositing gold nanoparticles prior to NW growth were studied. Second, the growth of NWs from the gold nanoparticles in a Chemical Vapour Deposition (CVD) process was comprehensively studied and optimized for subsequent integration of NWs in µTEGs, both of Si and Si-Ge. All important properties – NW length, diameter, density, doping and alignment – could be controlled by tuning the seeding gold nanoparticles and the process conditions, namely temperature, pressure, flows of reactants and growth time. Finally, integration was demonstrated in micro-structures for thermoelectric generation and characterization. The optimization process yielded to fully integrated thermoelectric Si/Si-Ge NW arrays with diameters and densities of ~100 nm and 5 NW/µm2 respectively. In Chapter 4 the Si NWs were thermoelectrically characterized. The Seebeck coefficient, electrical conductivity and thermal conductivity of arrays and single Si-NWs were measured in microstructures devoted to characterization comprising NWs integrated as in final µTEG application. Additionally a novel atomic force microscope based method for determination of thermal conductivity was explored. Then the results were discussed comparing them with existing literature. A ZT of 0.022 was found at room temperature, revealing an improvement of factor 2-3 with respect to bulk. In Chapter 5 The harvesting capabilities of µTEGs ...