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Contributed Review: Quartz force sensing probes for micro-applications

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  • معلومة اضافية
    • Contributors:
      Service de physique de l'état condensé (SPEC - UMR3680); Institut Rayonnement Matière de Saclay (DRF) (IRAMIS); Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Paris-Saclay-Centre National de la Recherche Scientifique (CNRS); Institut des Systèmes Intelligents et de Robotique (ISIR); Université Pierre et Marie Curie - Paris 6 (UPMC)-Centre National de la Recherche Scientifique (CNRS)
    • بيانات النشر:
      HAL CCSD
      American Institute of Physics
    • الموضوع:
      2016
    • Collection:
      HAL-CEA (Commissariat à l'énergie atomique et aux énergies alternatives)
    • نبذة مختصرة :
      International audience ; As self-sensing and self-exciting probes, quartz sensors present many advantages over silicon cantilevers for microscopy, micro-robotics, and other micro-applications. Their development and use is further bolstered by the fact that they can be manufactured from common quartz components. This paper therefore reviews applications of the increasingly popular quartz tuning fork probes as force sensors in the literature and examines the options for higher-frequency quartz probes using the other available types of flexional, thickness-shear or length-extensional resonators.
    • Relation:
      hal-01376573; https://hal.sorbonne-universite.fr/hal-01376573; https://hal.sorbonne-universite.fr/hal-01376573/document; https://hal.sorbonne-universite.fr/hal-01376573/file/Abrahamians_2016_Contributed_Review.pdf
    • الرقم المعرف:
      10.1063/1.4958896
    • الدخول الالكتروني :
      https://hal.sorbonne-universite.fr/hal-01376573
      https://hal.sorbonne-universite.fr/hal-01376573/document
      https://hal.sorbonne-universite.fr/hal-01376573/file/Abrahamians_2016_Contributed_Review.pdf
      https://doi.org/10.1063/1.4958896
    • Rights:
      info:eu-repo/semantics/OpenAccess
    • الرقم المعرف:
      edsbas.5E04C269