نبذة مختصرة : International audience ; In this work, the effects of the N2 addition to the SF6 plasma used in the isotropic silicon etching of Microelectromechanical systems (MEMS) with Au components are investigated. A four-variables Doehlert design was implemented for optimizing the etching parameters (power, pressure, gas flow rate, and N2 /SF6 ratio) to maximize the lateral etch rate of Si using SF6 /N2 gas mixture. The optimized etch condition founded for a lateral etch rate of 1.8 mm/min was: power = 143 W, chamber pressure = 86 mTorr, flow rate = 22 sccm, and N2 /SF6 ratio = 0.1. Furthermore, it was demonstrated that the established etching process avoids the structure damage of Au components.
No Comments.