Talpinių mikromontuojamų ultragarsinių keitiklių panaudojimas biojutikliams / ; Application of capacitive micromachined ultrasound transducers for biosensors.

Many chemical, biological and biochemical sensors are based on specific materials interactions. For the detection of interactions, may be used mass measurement resonant chemical sensors (i.e., gravimetric sensors) with functionalized surface that specifically adsorb target molecules from the environment. In essence, these are electromechanical resonant systems, potentially infinite variety of functional materials, adapted in various fields. Appropriate functional materials, immobilized on the surface of the sensor, must be adapted to measure the various analytes (chemical, biochemical components, which should be determined during the analytical procedure). The specific interaction of target material molecules with the microelectromechanical structure helps to detect the most commonly found biological elements, such as enzymes, antibodies, DNA oligonucleotides, proteins. The key engineering and fundamental knowledge was acquired in the doctoral dissertation research that are required for the fabrication and usage of CMUT structures for bio sensing applications. Functionalization methods of the biosensor were developed, the measured signal informativity was justified and its usefulness for analyte detection were determined. The technological concept was justified by demonstration of operating prototype “comb-type” sensor with integrated microchannel in a liquid media in the real time while at the same time measuring the biochemical interactions using other devices.