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Pull-in control during nanometric positioning by near field position sensing

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  • معلومة اضافية
    • Contributors:
      GIPSA - Systèmes linéaires et robustesse (GIPSA-SLR); Département Automatique (GIPSA-DA); Grenoble Images Parole Signal Automatique (GIPSA-lab); Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Grenoble Images Parole Signal Automatique (GIPSA-lab); Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Pierre Mendès France - Grenoble 2 (UPMF)-Université Stendhal - Grenoble 3-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS); GIPSA - Systèmes non linéaires et complexité (GIPSA-SYSCO)
    • بيانات النشر:
      HAL CCSD
    • الموضوع:
      2008
    • Collection:
      Université Grenoble Alpes: HAL
    • الموضوع:
      Cancun; Mexico
    • نبذة مختصرة :
      6 pages ; International audience ; This paper deals with the pull-in control and the nanopositioning of an electrostatically actuated NEMS (Nano Electromechanical System) squeezed between two forces. It is shown that when a position sensor is driven close to a NEMS, pull-in occurs due to electrostatic forces, but also to near field forces acting at nanoscale, namely Casimir and Van der Waals forces. Pull-in conditions are investigated to find the minimum pull-in distance depending on the parameters of the system. This paper aims to demonstrate that the sensor can be driven below this minimum pull-in distance. To do so, a control strategy based on a nonlinear feedback design and on a robust pole placement/sensitivity function shaping is proposed. Furthermore, it is shown that the NEMS position can be controlled without contact while avoiding pull-in and decreasing its natural brownian motion.
    • Relation:
      hal-00371264; https://hal.science/hal-00371264; https://hal.science/hal-00371264/document; https://hal.science/hal-00371264/file/Blanvillain_CDC08.pdf
    • Rights:
      info:eu-repo/semantics/OpenAccess
    • الرقم المعرف:
      edsbas.4F2D5A32