Vytváření jemných otvorů do křemenného skla pomocí elektronového svazku ; Creation of fine holes into quartz glass by electron beam

This paper shows possibilities of micromachining by pulse electron beam for creation of fine holes into quartz glass. The influence of different parameters of electron beam (such as beam current, focus, pulse duration) is demonstrated. Accelerating voltage of 50 kV, beam current of 0.1 - 1 mA and pulse duration of 15 - 150 ms was applied. Diameter of created holes ranged from 101 μm to 100 mm on incident side and from 100 to 101 μm on the opposite side (disc thickness 0.7 mm).