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On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching

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اقرأ أكثر حفظ في قائمتي
  • معلومة اضافية
    • Contributors:
      Beijing Institute of Technology (BIT); Transduction, Propagation et Imagerie Acoustique - IEMN (TPIA - IEMN); INSA Institut National des Sciences Appliquées Hauts-de-France (INSA Hauts-De-France); Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA); Université catholique de Lille (UCL)-Université catholique de Lille (UCL); Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN); University of Chinese Academy of Sciences Beijing (UCAS); Chinese Academy of Sciences Beijing (CAS); 10.13039/501100012166-National Key Research and Development Program of China (Grant Number: 2018AAA0100301,2018YFF01010304)10.13039/501100001809-National Natural Science Foundation of China (Grant Number: 62174012,61704166)10.13039/501100012236-Beijing Institute of Technology Research Fund Program for Young Scholars (Grant Number: 201904006)10.13039/501100005085-Beijing Institute of Technology
    • بيانات النشر:
      HAL CCSD
      IEEE
    • الموضوع:
      2021
    • Collection:
      Université Polytechnique Hauts-de-France: HAL
    • الموضوع:
      Wuhan; China
    • نبذة مختصرة :
      International audience ; Microelectromechanical system (MEMS) is an interdisciplinary research and education field. The multiphysics simulation can make the abstract theory on MEMS design concrete and improve the learning efficiency. A MEMS course design is presented in this paper. The content consists of fundamental theory on MEMS design and hands-on simulation experiments. The essence of multiphysics coupling is revealed. Simulation cases are displayed. Teaching approaches are applied in the course design including hands-on simulation experiments, from an easy task to the difficult one and integration of simulation cases and theory lectures. The course design has guiding significance for other science and engineering curriculum design.
    • Relation:
      hal-03548801; https://hal.science/hal-03548801; https://hal.science/hal-03548801/document; https://hal.science/hal-03548801/file/JYZhang_2021_TALE.pdf; WOS: 000810176600112
    • الرقم المعرف:
      10.1109/TALE52509.2021.9678780
    • Rights:
      info:eu-repo/semantics/OpenAccess
    • الرقم المعرف:
      edsbas.1F070747