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Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

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  • معلومة اضافية
    • بيانات النشر:
      Nature Portfolio, 2018.
    • الموضوع:
      2018
    • نبذة مختصرة :
      Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear. Here, we report the electrical characteristics and electron information in single-frequency (4.52 MHz and 13.56 MHz) and dual-frequency (a combination of 4.52 MHz and 13.56 MHz) capacitive discharges within the abnormal α-mode regime at atmospheric pressure. A continuum radiation-based electron diagnostic method is employed to estimate the electron density (ne) and temperature (Te). Our experimental observations reveal that time-averaged ne (7.7–14 × 1011 cm−3) and Te (1.75–2.5 eV) can be independently controlled in dual-frequency discharge, whereas such control is nontrivial in single-frequency discharge, which shows a linear increase in ne and little to no change in Te with increases in the rf input power. Furthermore, the two-dimensional spatiotemporal evolution of neutral bremsstrahlung and associated electron heating structures is demonstrated. These results reveal that a symmetric structure in electron heating becomes asymmetric (via a local suppression of electron temperature) as two-frequency power is simultaneously introduced.
    • ISSN:
      2045-2322
    • Rights:
      OPEN
    • الرقم المعرف:
      edsair.doi.dedup.....df32fd747699a398110841383a7070ef