نبذة مختصرة : after Ion Implantation J. Simeg Veternikovaa,∗, E. Korhonen, M. Skarba, J. Degmova, V. Sabelova, S. Sojak and V. Slugen Institute of Nuclear and Physical Engineering, Faculty of Electrical Engineering and Information Technology Slovak University of Technology, Ilkovicova 3, 812 19 Bratislava, Slovakia Departments of Applied Physics, Aalto University, P.O. Box 11100, FI-00076 Aalto, Finland Institute of Materials Science, Faculty of Material Science and Technology, Slovak University of Technology Bottova 25, 917 24 Trnava, Slovakia
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