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High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer

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  • معلومة اضافية
    • بيانات النشر:
      Surface Analysis Society of Japan, 2012.
    • الموضوع:
      2012
    • ISSN:
      1347-8400
      1341-1756
    • الرقم المعرف:
      10.1384/jsa.18.174
    • Rights:
      OPEN
    • الرقم المعرف:
      edsair.doi...........bd14781a43e1c6ef7dc4b7d60f783c86