Optimization of diffractive MEMS for optical switching

Diffractive Micro-Electro-Mechanical Systems (D-MEMS) have enjoyed increased attention in the fields of communication, spectroscopy, projection display, and maskless lithography. Redirecting an optical signal into predefined angles, precisely balancing this optical signal, inherent wavelength filtering capability and high switching speed are some of the advantages over other optical MEMS. D-MEMS based on customized IC fabrication processes are being used to assemble system-level architectures for integration into mainstream circuitry. The goal of this work is to improve the optical performance while minimizing the power consumption and operational voltage. Operational characteristics of new D-MEMS have achieved a reduction of the optical switching voltage to 2V at a 6.5V bias. Structural modifications through variation in ruling/top-electrode width and spacing have been studied. An alternative structural material, polyimide, is being optimized for further decreasing the operating voltage of the D-MEMS dev...