CMOS differential-capacitance-to-frequency converter utilising repetitive charge integration and charge conservation.

A low-complexity CMOS circuit is proposed for reading out monolithically integrated differential capacitive sensors. It directly converts the differential capacitance of a MEMS sensing device to a frequency by accumulating the charges produced by repeated charge integration and charge conservation. A prototype chip has been designed and fabricated in 0.35 µm CMOS technology. Experimental results show that differential capacitance is linearly converted to output frequency. [ABSTRACT FROM AUTHOR]

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