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Formation of Carbon Layers by the Thermal Decomposition of Carbon Tetrachloride in a Reactor for MOCVD Epitaxy.
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- المؤلفون: Zvonkov, B. N.1 (AUTHOR); Vikhrova, O. V.1 (AUTHOR) ; Danilov, Yu. A.1 (AUTHOR); Dorokhin, M. V.1 (AUTHOR); Demina, P. B.1 (AUTHOR); Drozdov, M. N.2 (AUTHOR); Zdoroveyshchev, A. V.1 (AUTHOR); Kriukov, R. N.1 (AUTHOR); Nezhdanov, A. V.3 (AUTHOR); Antonov, I. N.1 (AUTHOR); Plankina, S. M.3 (AUTHOR); Temiryazeva, M. P.4 (AUTHOR)
- المصدر:
Semiconductors. Aug2020, Vol. 54 Issue 8, p956-960. 5p.
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