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High-Performance Polycrystalline Silicon TFTs using Self- Aligned Grain Boundary Control Technique.

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  • المؤلفون: Shinohara, Toshiro1; Tarui, Yasuo1
  • المصدر:
    Electronics & Communications in Japan, Part 2: Electronics. Oct93, Vol. 76 Issue 10, p99-107. 9p.